| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacture holder of a piezoelectric diaphragm and the manufacturing method of the piezoelectric diaphragm, capable of suppressing a manufacture cost and improving manufacture efficiency. SOLUTION: This manufacture holder 3 is in a square pole shape as a whole and holding parts 31 for sucking, and holding the piezoelectric diaphragms 1 and 2 are set at respective main plane parts. Suction holes 32 for distributing air are formed at the respective holding parts 31 and the suction holes 32 are connected through an exhaust conductor 33 to an exhaust pump. The piezoelectric diaphragms 1 and 2 are attached to the holding parts 31 and adhered tightly to an O-ring 4 which is a shielding member. In the state, they are immersed in etchant for prescribed time and prescribed etching is performed.
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