MANUFACTURE AND STRUCTURE OF COLD CATHODE ARRAY ELEMENT AND COLD CATHODE ARRAY IMAGE PICK-UP ELEMENT

摘要

PROBLEM TO BE SOLVED: To combine a cold cathode array and a driving control circuit by installing a region selecting circuit for selecting an electron beam emitting region of a cold cathode array emitting electron beams and a driving control circuit for controlling electron beam emission on the same required conductive semiconductor board, and connecting them. SOLUTION: A cold cathode array region for emitting electron beams are formed by forming a silicon oxide film 2 and a silicon nitride film 3 on a semiconductor n-type silicon board 1. A driving control circuit composed of a region selecting circuit for selecting an electron beam emission region of a cold cathode array and a level conversion circuit for controlling electron beam emission is constituted in a CMOS logic circuit region. An N/P MOS transistor region is formed with a photo resist 91, by exposure of required pattern, and etching, and cold cathode arrays formed in each process and the driving control circuit are connected. A cold cathode array image pick-up element can be manufactured by combining on the same board.