发明名称 |
PRODUCTION OF LIQUID CRYSTAL DISPLAY DEVICE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a process for producing a liquid crystal display device using wiring materials which can be produced at a low cost while high reliability and good image quality are assured with a irreducible number of photomasks. SOLUTION: Scanning signal electrodes are composed of laminated films of Ta electrodes 10 and Al electrodes 11 in the process for producing the liquid crystal display device having the scanning signal electrodes 10 and 11, video signal electrodes 14 intersecting with the scanning signal electrodes and thin-film transistors near the intersected points of the scanning signal electrodes and the video signal electrodes on an insulating substrate 1. Anodically oxidized films 20 and 21 are formed on the surface/flanks of the laminated films. External connection terminal parts are formed by etching away the Al electrodes 11 of the upper layers with the anodically oxidized films 20 and 21 as a mask and exposing only the Ta electrodes 10. An a-Si:H film 30 and a gate SiN film 22 are processed to have the same patterns. Shorting defects may be decreased by suppressing the hillock of the surface. The external connecting terminals having high corrosion resistance can be embodies. The structure described above may be formed by one time of photolithographic process and the production stages can be simplified.</p> |
申请公布号 |
JP2001051305(A) |
申请公布日期 |
2001.02.23 |
申请号 |
JP20000208473 |
申请日期 |
2000.07.10 |
申请人 |
HITACHI LTD |
发明人 |
KAWACHI GENSHIRO;ABU KOICHI |
分类号 |
G02F1/136;G02F1/1368;G09F9/00;G09F9/30;(IPC1-7):G02F1/136 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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地址 |
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