| 摘要 |
PROBLEM TO BE SOLVED: To discriminate a substrate defect from a substrate deposit by inspecting the defect by a substrate defect-inspecting device, before washing for recording the result, and inspecting the defect again after the washing, and then comparing substrate defect inspection information before and after a cleaning process. SOLUTION: A substrate defect-inspecting device 4 comprises a light source 5 and a light reception part 6 arranged with a gap to a substrate 1, a data- processing part, a substrate table traveling in the X and Y directions of a horizontal position where the substrate 1 is placed, and the like. In this configuration, a light beam is applied from the light source 5 before cleaning. Then, when a defect 2 exists at a position before inspection, the inspection information is stored at the information storage part of a substrate defect-inspecting machine 4, the substrate table is moved in X and Y directions, and the entire surface of the substrate is inspected and stored at the information storage part. Then, after the substrate 1 is cleaned, the inspection information on the entire surface of the substrate 1 is stored by the similar means again. Then, inspection information before and after cleaning the substrate 1 is incorporated into the substrate defect-inspecting machine 4 or it is compared by an external computer.
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