| 摘要 |
PROBLEM TO BE SOLVED: To increase analysis accuracy near a boundary to the foundation of a thin-film sample. SOLUTION: A light emission part 1 is equipped with a first electrode 11 and a second electrode that has a smaller diameter than the first electrode 11 and can advance toward and retreat from positions B and F. Voltage is applied between the electrode and a sample 2 by a power supply 4 for generating glow discharge 8, and generated light 9 is introduced to a spectral part 21 for spectral detection, and the qualitative/quantitative analysis of an element being contained in the sample 2 is made. Although, in the sample 2, a thin film is coated on foundation 2B, a second electrode 12 is allowed to retreat to the position B while a thin film 2A is analyzed, and the voltage is applied to the first electrode 11 for discharging for analysis. When the entire thin film 2A is sputtered for exposing the foundation 2B, the second electrode 12 is advanced to a position F for changing a switch 3, and the voltage is applied to the second electrode 12 for discharging, thus reducing a discharge range on a sample surface on the analysis of the foundation 2B, and hence eliminating the influence of an element being evaporated from the side surface of a crater.
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