METHOD AND APPARATUS FOR GENERATING VACUUM ULTRAVIOLET LIGHT AND APPARATUS FOR UTILIZING THE SAME

摘要

PROBLEM TO BE SOLVED: To stably generate vacuum ultraviolet light, having wavelength of 157 nm using a compact arrangement. SOLUTION: A laser beam 11, having wavelength of 1,046 nm generated from a solid-state laser 10 utilizing active ions of Nd or Yb is converted by nonlinear optical crystals 35-37 into a fifth higher harmonic laser beam 31, having a wavelength of 213 nm. The laser light 31 having converted wavelength of 213 nm is projected into hydrogen gas 40 to produce laser light 21 having wavelength of 157 nm by a fourth order anti-Stokes stimulated Raman scattering.