| 摘要 |
PROBLEM TO BE SOLVED: To obtain a hot plate unit capable of uniformly cooling the whole body of the hot plate unit within a short period of time. SOLUTION: This hot plate unit 1 is provided with a resistance body 10 arranged on an opening part 4 of a casing 2 having a bottom. Between the casing 2 and a hot plate 3, a substantially tightly closed space S1 is formed. On the bottom 2a of the casing 2, two pieces of a fluid supply port 17 and a fluid exhaust port 18 are respectively provided.
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