| 摘要 |
PROBLEM TO BE SOLVED: To obtain an X-ray fluorescence analyzer by which the series of characteristic X-rays to be used regarding an element to be quantitatively analyzed can be selected automatically and properly, by taking the S/N ratio into consideration on the basis of the result of a qualitative analysis. SOLUTION: A decision means 13 by which the series of characteristic X-rays to be used regarding an element to be analyzed quantitatively is decided on the basis of the comparison of the measuring intensity of the scattered radiation of primary X-rays 3 scattered by a sample with a prescribed reference line is provided. By the decision means 13, the series of the characteristic X-rays to be used regarding the element to be analyzed quantitatively is selected properly by taking S/N ratio into consideration, a detection limit becomes low, and the element can be analyzed simply and precisely. In addition, even regarding a heavy element in a sample composed mainly of a light element, characteristic X-rays in a series which easily reaches a saturation thickness in terms of X-rays are selected by the decision means 13, an error due to the thickness of the sample is hard to generated, and the element can be analyzed simply and precisely in this respect.
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