| 摘要 |
PROBLEM TO BE SOLVED: To normally operate a sensor element constituting the edge of a matrix by forming a guard electrode window extending, crossing over the edge of photoconductor structure, the edge of an active imaging surface, to the matrix. SOLUTION: A sensor element contains a photoconductor structure 6, formed between a common reference electrode 2 and a collector electrode 3. The collector electrode 3 is embedded into a passivation layer 7 of a substrate 8, such as a glass layer and is connected to a read lead with 5 through a switching element. A guard electrode window 9 is formed at the same level as the collector electrode 3. The guard electrode window is arranged between the passivation layer on the read lead wire 5 and the photoconductor structure 6. The guard electrode window properly shield a parasitic signal, because the window extends up to the section in the vicinity of the edge of the lower layer 6a of the photoconductor structure and is electrified with the same potential as the read lead wire 5.
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