发明名称 FLANGED PROBE, MANUFACTURE OF FLANGED PROBE AND PROBE CARD
摘要 PROBLEM TO BE SOLVED: To obtain a probe which can manufacture a probe card simply and at a low cost and which eliminates a need of a cleaning operation by generating scrub. SOLUTION: This flanged probe is provided with a flange part 130. The flanged probe is provided with a contact part 110, which is extended and installed on one side from the flange part 130. The flanged probe is provided with a connection part 120 which is extended and installed on the other side from the flange part 130. The contact part 110 is provided with a curved part 111 and a curved part 113, and the connection part 120 is formed to be straight. The flanged probe can he attached to a probe card, in a state such that the flange part is applied to one face of a support board which constitutes the probe card. In addition, since the connection part is formed to be straight, it is pulled out or inserted straight, when the probe card is assembled or the flanged probe is replaced. Consequently, the flanged probe has an advantage such that its assembling operation or the like becomes easy.
申请公布号 JP2001050981(A) 申请公布日期 2001.02.23
申请号 JP19990224920 申请日期 1999.08.09
申请人 JAPAN ELECTRONIC MATERIALS CORP 发明人 OKUBO MASAO;NISHIZAKI SHUNICHIRO;OKUBO KAZUMASA;FURUSAKI SHINICHIRO;SAKATA TERUHISA
分类号 G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R31/26
代理机构 代理人
主权项
地址