| 摘要 |
PROBLEM TO BE SOLVED: To prevent occurrence of image ununifomity by providing a second pressurizing mechanism with a second adsorption mechanism and a second substrate and lowered in the vertical direction in a vacuum vessel under reduced pressure, and the second substrate and a first substrate are stuck to each other via an adhesive, then are pressurized up to a prescribed interval. SOLUTION: A second adsorbing mechanism 20 and an upper substrate 6 are lowered in the vertical direction by a first pressurizing mechanism 26, having a first pressurizing force in a vacuum vessel 24. The vacuum vessel 24 is closed tightly and 'evacuated' to a prescribed reduced pressure, thereby bringing the upper substrate 6 and an adhesive 10 into contact with each other, while maintaining the reduced pressure. Then the second adsorption mechanism 20 and the upper substrate 6 are further lowered in the vertical direction by a second pressurizing mechanism 28, having a second pressurizing force in the vacuum vessel 24. The upper substrate 6 and a lower substrate 4 are stuck to each other via the adhesive 10 and pressurized up to a prescribed interval. In this case, the second pressurizing mechanism 28 is located at a portion different from that of the first pressurizing mechanism 26, and the second pressurizing force is set larger than the first pressurizing force.
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