| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent positional deviation of a substrate support pins by reducing displacement or deformation of a horizontal support member for supporting the substrate support pins directly below a placement stage. SOLUTION: This horizontal support member 34 is made of a metal or ceramic, and has a ring-shaped support body 44, having three substrate supporting pins 32A, 32B and 32C erected or implanted within a horizontal plane at 120 deg. intervals in the circumferential direction and a pair of shoulder parts 46 and 48 for connecting a pair of ends, facing opposite to each other, of the ring-shaped support body 44 to the upper end parts of both vertical support rods 36 and 38. Both the shoulder parts 46 and 48 comprises horizontal joint members 52 and L-shaped joint members 54, which are integrally connected with bolts 50. The both vertical supporting rods 36 and 38 are connected to a driving means for lifting such as a pneumatic cylinder.</p> |
