PRODUCTION OF LIQUID CRYSTAL DISPLAY PANEL

摘要

PROBLEM TO BE SOLVED: To provide a process for producing a monolithic liquid crystal display panel large in area and high in image quality. SOLUTION: A protective film 11 and an amorphous silicon film 12 are successively formed on an insulating substrate 10 and a region 4a planned for forming a pixel part is irradiated with UV rays U by a UV lamp 20 and is annealed. A region 2a planned for forming a horizontal scanning part and a region 3a planned for forming a perpendicular scanning part are integrally irradiated respectively with excimer lasers L and are annealed. A polycrystalline silicon film 4b obtained by these stages is made uniform in crystal grains and the polycrystalline silicon film 3b is made into large crystal grains. Thin-film transistors are respectively formed in these regions, by which the monolithic liquid crystal display panel large in area and high in image quality can be produced.