| 摘要 |
PROBLEM TO BE SOLVED: To provide a quartz optical waveguide device with extremely low polarization dependency and low loss, particularly, an array waveguide grating device. SOLUTION: In a quartz optical waveguide device comprising a lower clad layer 2, a core 3, and an upper clad layer 4, which are formed on a Si substrate 1, the lower clad layer 2 and the upper clad layer 4 are formed of BPSG films (phosphor and boron-added quartz films). The lower and upper clad layers are formed by a heat treatment at 800-1000 deg.C, and the sum of weight concentrations of elements P and B added to the film is within the range of 8.8 wt.% to 15 wt.% The slippage of transmitted central wavelength depending on polarization of the array waveguide grating device is 0.03 nm or less. |
