发明名称 ANALYZING METHOD AND DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain an analyzing method and device with the advantage of cost and time as a device capable of simply and speedily collecting and analyzing a chemical liquid after dissolution without the need for an expensive device, in an analytical technique to supply chemical liquid for a surface to be analyzed of a material to be analyzed, dissolve a part to be analyzed of the surface to be analyzed, and collect and analyze the chemical liquid after dissolution. SOLUTION: In this analytical technique to supply a chemical liquid for a surface to be analyzed of a material to be analyzed 1, to dissolve a part to be analyzed of the surface to be analyzed, and to collect and analyze the chemical liquid after dissolution, (1) by forming the surface to be analyzed of the material to be analyzed 1 in a recessed shape 10, the chemical liquid is collected at its recessed bottom part after dissolution and analyzed in this analyzing method and device. In this analyzing method and device, (2) chemical liquid is supplied in a form to surround a location on the surface to be analyzed at which the chemical liquid is to be collected after dissolution, and the chemical liquid after dissolution is collected at one location on the surface to be analyzed for analysis. (3) This analyzing method and device are provided with the constitutions (1), and (2).
申请公布号 JP2001050875(A) 申请公布日期 2001.02.23
申请号 JP19990226093 申请日期 1999.08.10
申请人 SONY CORP 发明人 YAMAZAKI TOSHIYUKI;KAWASHIMA MASAHITO
分类号 G01N31/00;G01N1/28;G01N33/00;H01L21/66;(IPC1-7):G01N1/28 主分类号 G01N31/00
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