| 摘要 |
PROBLEM TO BE SOLVED: To prevent adverse effects when a second reflecting film and a dummy disk are separated by partly separating the second reflecting film and dummy disk by applying a mechanical force from a center opening, supplying a compressed air between a disk substrate and the dummy disk, and separating the dummy disk from the second reflecting film. SOLUTION: A wedge part 16a as a head part of a mechanical preparatory separation mechanism 16 is positioned in center holes 4 of a disk substrate 1 and a dummy disk 2. Three wedge parts 16a are moved by a driving device to increase a diameter. A leading end 16a' of each wedge part enters to pry open a gap between the disk substrate 1 and dummy disk 2, whereby a nearly uniform separation is brought about along an inner periphery between the disk substrate 1 and the dummy disk 2. A space is present between the disk substrate 1 and dummy disk 2 at the side of the center holes 4. A compressed air from a pressure chamber enters the space thereby acting to widen the space between the substrates from the side of center holes. The interface separation sequentially rapidly spreads nearly concentrically.
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