| 摘要 |
PROBLEM TO BE SOLVED: To improve condensing performance by increasing the change in curvature of a reflection plane. SOLUTION: This device is equipped with a mirror element 20, having a piezoelectric device 30 consisting of a piezoelectric layer 33 and first and second electrodes 32, 34 holding the layer 33 between the electrodes, and a mirror film structure to reflect light, and with a driving device 50 disposed corresponding to the mirror element 20. In this device, the piezoelectric device 30 has at least two through-holes 21, 22 penetrating in the thickness direction of the mirror element 20, and the first and second electrodes 32, 34 are extended through the holes 21, 22 to a substrate 11, respectively. The piezoelectric device is also equipped with first and second extended portions 41, 42 to support the mirror element 20 on the substrate 11. Thus, the outer edge of the piezoelectric device 30 is made as a free end.
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