发明名称 WIRE BONDER
摘要 PROBLEM TO BE SOLVED: To prevent radiation heat to an ultrasonic horn using a simple structure, without causing reduction in bonding quality. SOLUTION: A heat shield plate 20, stationed downward of an ultrasonic horn 11, is fixed to a heat block support plate 5 moving vertically integrally with a heat block 4. Furthermore, the heat shield plate 20 has release parts 21, 22 of which downward and heat block 4 sides are released, and the end part of the release part 22 comes into close contact with the side plane of the heat block 4.
申请公布号 JP2001053104(A) 申请公布日期 2001.02.23
申请号 JP19990223733 申请日期 1999.08.06
申请人 SHINKAWA LTD 发明人 KABAKI WATARU;TOMIYAMA TOSHIHIKO
分类号 H01L21/60;H01L23/40 主分类号 H01L21/60
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