| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer mirror for extreme ultraviolet rays having an improved reflectance at a desired wavelength. SOLUTION: This mirror has a reflection material for radiation reflection in a desired wavelength range, i.e., a laminated body comprising a first material and a second material alternately laminated. The first material has a real refractive index smaller than the second material in the desired wavelength range. In the mirror, at least one layer of a third material is sandwiched in the laminated body, while tire third material is selected from a group including Rb, RbCl, RbBr, Sr, Y, Zr, Ru, Rh, Tc, Pd, Nb and Be, and alloys and compounds of the materials. Preferably, one layer of the third material is sandwiched between each the pair of the layers of the first and second material, while at least one layer of a forth material is sandwiched in the laminated body. The forth material is selected from the group including Rb, RbCl, RbBr, Sr, Y, Zr, Ru, Rh, Tc, Pd, Nb and Be, and alloys and compounds of the materials. |
