Production of thin single crystalline layers or layer system by depositing on a substrate comprises deviating the surface normals from the specified directions of the substrate to produce steps

摘要

Production of thin single crystalline layers or layer system by depositing on a substrate comprises deviating the surface normals from the (111) and/or (0001) direction of the substrate in such a way that steps are produced which run parallel to the preferred steps only of a possible domain of the layer to be produced.