发明名称 WORKPIECE CARRIER WITH SEGMENTED AND FLOATING RETAINING ELEMENTS
摘要 An improved workpiece carrier assembly (100) includes a workpiece retaining assembly (122) having a plurality of distinct retaining elements (202) rather than a one-piece retaining ring. In accordance with one embodiment, a plurality of retaining segments (202) reside within a like plurality of channels. The retaining segments (202) may be individually or collectively controlled by a pressurized fluid system. In accordance with an alternate embodiment, a plurality of retaining pins reside within a like plurality of guide sleeves. The retaining pins may be individually or collectively controlled by a pressurized fluid system.
申请公布号 WO0112385(A1) 申请公布日期 2001.02.22
申请号 WO2000US21485 申请日期 2000.08.07
申请人 SPEEDFAM-IPEC CORPORATION 发明人 KIM, INKI;MELONI, MARK;PARK, MIKE
分类号 B24B37/32;B24B53/007;B24B53/017 主分类号 B24B37/32
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