发明名称 |
WORKPIECE CARRIER WITH SEGMENTED AND FLOATING RETAINING ELEMENTS |
摘要 |
An improved workpiece carrier assembly (100) includes a workpiece retaining assembly (122) having a plurality of distinct retaining elements (202) rather than a one-piece retaining ring. In accordance with one embodiment, a plurality of retaining segments (202) reside within a like plurality of channels. The retaining segments (202) may be individually or collectively controlled by a pressurized fluid system. In accordance with an alternate embodiment, a plurality of retaining pins reside within a like plurality of guide sleeves. The retaining pins may be individually or collectively controlled by a pressurized fluid system. |
申请公布号 |
WO0112385(A1) |
申请公布日期 |
2001.02.22 |
申请号 |
WO2000US21485 |
申请日期 |
2000.08.07 |
申请人 |
SPEEDFAM-IPEC CORPORATION |
发明人 |
KIM, INKI;MELONI, MARK;PARK, MIKE |
分类号 |
B24B37/32;B24B53/007;B24B53/017 |
主分类号 |
B24B37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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