| 摘要 |
<p>The excimer laser pulsed discharge circuit includes a high voltage power supply, a main storage capacitor which is charged by the power supply, a pulse compression circuit and a switch for permitting the storage capacitor to discharge through the pulse compression circuit to the electrodes. The pulse compression circuit includes a series of pulse compression stages each having a stage capacitance and being separated by a stage inductance. A final stage capacitance is provided by a set of peaking capacitors (cp) connected through a first inductance (lp) to the electrodes (42) and a set of sustaining capacitors (cs) connected to the electrodes through a second inductance (ls) substantially greater than the first inductance, such that current pulses through the discharge are temporally extended relative to current pulses of a system having its final stage capacitance provided only by a set of peaking capacitors connected to the electrodes via a lower inductance, and an amplified spontaneous emision (ASE) level in the laser pulses is reduced thereby enhancing their spectral purity.</p> |
