发明名称 |
Means for supporting a mask |
摘要 |
To prevent tilting or bending of a large mask frame holder and at the same time to prevent distortion when the mask holding frame is attached to a support base by ball plungers in three of the four corner areas of a mask holding frame that engage V groove bodies which face the ball plungers on the surface of the base, compression springs are provided in those three corners which pre-stress the mask holding frame toward the support base while a compression spring is provided between the remaining corner area of the mask holding frame and the base which acts in a direction pressing the mask holding frame away from the support base, thereby preventing the mask holding frame from bending or tilting. As an alternative, in each of the three pre-stressed corner areas of the mask holding frame, instead of a compression spring, an elastic attachment component in the form of a bracket with spring-like legs mounted to the supporting component can be provided. <IMAGE> |
申请公布号 |
EP0881538(A3) |
申请公布日期 |
2001.02.21 |
申请号 |
EP19980109558 |
申请日期 |
1998.05.26 |
申请人 |
USHIODENKI KABUSHIKI KAISHA |
发明人 |
KAWAHASHI, TAKASHI;KAI, HIROMI |
分类号 |
G03F7/20;H01L21/027;H01L21/68 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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