发明名称 |
Onium salts, photoacid generators for resist compositions, and patterning process |
摘要 |
<p>Onium salts of the formula (1) are novel. <CHEM> R<1> is C1-10 alkyl or C6-14 aryl, R<2> is H or C1-6 alkyl, p is an integer of 1 to 5, q is an integer of 0 to 4, p+q = 5, R<3> is C1-10 alkyl or C6-14 aryl, M is a sulfur or iodine atom, and "a" is equal to 3 or 2. A chemical amplification type resist composition comprising the onium salt as a photoacid generator is suited for microfabrication, especially by deep UV lithography because of many advantages including improved resolution, minimized line width variation or shape degradation even on long-term PED, minimized defect after coating, development and stripping, and improved pattern profile after development.</p> |
申请公布号 |
EP1077391(A1) |
申请公布日期 |
2001.02.21 |
申请号 |
EP20000306997 |
申请日期 |
2000.08.16 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
OHSAWA, YOUICHI;WATANABE, JUN;KUSAKI, WATARU;WATANABE, SATOSHI;NAGATA, TAKESHI;NAGURA, SHIGEHIRO |
分类号 |
C07C309/71;C07C309/73;C07C381/12;G03F7/004;G03F7/039;(IPC1-7):G03F7/004 |
主分类号 |
C07C309/71 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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