INK JET RECORDING HEAD, MANUFACTURE THEREOF, AND INK JET RECORDER

摘要

PROBLEM TO BE SOLVED: To obtain a high density ink jet recording head in which crosstalk is reduced between respective pressure generating chambers. SOLUTION: The ink jet recording head comprises a single crystal silicon substrate 10 defining a pressure generating chamber 12 communicating with a nozzle opening 21, and a piezoelectric element 300 provided in a region facing the pressure generating chamber 12 through a diaphragm 50 constituting a part of the pressure generating chamber 12 and generating pressure variation therein, wherein the pressure generating chamber 12 is formed without penetrating the single crystal silicon substrate 10 by etching it anisotropically and the piezoelectric element 300 comprises a thin film formed by film deposition or lithography.