发明名称 Spacer patterned, high dielectric constant capacitor
摘要 A high dielectric constant memory cell capacitor and method for producing the same, wherein the memory cell capacitor utilizes relatively large surface area conductive structures of thin spacer width pillars or having edges without sharp corners that lead to electric field breakdown of the high dielectric constant material. The combination of high dielectric constant material in a memory cell along with a relatively large surface area conductive structure is achieved through the use of a buffer material as caps on the thin edge surfaces of the relatively large surface area structures to dampen or eliminate the intense electric field which would be generated at the corners of the conductive structures during the operation of the memory cell capacitor had the caps not been present.
申请公布号 US6190965(B1) 申请公布日期 2001.02.20
申请号 US19990234282 申请日期 1999.01.19
申请人 发明人
分类号 H01L21/02;H01L21/8242;(IPC1-7):H01L21/824 主分类号 H01L21/02
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