发明名称 Method and apparatus for analyzing cuts
摘要 A system for analyzing the quality of the sawing of a material which includes a scanning unit, a cut parameter identifier and a cut analyzer. The scanning unit scans along cuts of the material and views at least a portion of a cut. The cut parameter identifier identifies and stores parameters of the viewed cut portion. The cut analyzer analyzes the parameters of a multiplicity of viewed cut portions and which determines the quality of the cuts therefrom.
申请公布号 US6192289(B1) 申请公布日期 2001.02.20
申请号 US19980023558 申请日期 1998.02.13
申请人 INSPECTECH LTD. 发明人 GEFFEN MICHAEL;BEN-HAR ABRAHAM
分类号 G01N21/88;G01N21/956;G06F19/00;G06T7/00;H01L;H01L21/302;H01L21/66;H01L21/78;(IPC1-7):G06F19/00 主分类号 G01N21/88
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