Exposure device, method of making and using same, and objects exposed by the exposure device

摘要

Even when a surface temperature of an illumination optical system becomes high, detection accuracy of a reticle alignment detection system is not negatively affected. An illumination optical system irradiates an illumination light to a mask and exposes a substrate with the illumination light through the mask. A gas supply device supplies gas, which has been cleaned, to a case in which is disposed at least part of an illumination optical system. A temperature adjusting device adjusts the temperature of the case and the temperature in the vicinity of the case.