发明名称 |
Method of measuring electromagnetic radiation |
摘要 |
A method is provide for measuring electromagnetic radiation radiated from a surface of an object that is irradiated by electromagnetic radiation given off by at least one radiation source. The radiation given off by the radiation source is determined by at least one first detector, and the radiation given off by the irradiated object is determined by at least one second detector that measures the radiation. The radiation from the at least one radiation source is actively modulated with at least one characteristic parameter. The radiation determined by the second detector is corrected with the radiation determined by the first detector to compensate for the radiation of the radiation source reflected from the object.
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申请公布号 |
US6191392(B1) |
申请公布日期 |
2001.02.20 |
申请号 |
US19980208955 |
申请日期 |
1998.12.08 |
申请人 |
STEAG AST ELEKTRONIK GMBH |
发明人 |
HAUF MARKUS;KNARR THOMAS;WALK HEINRICH;BALTHASAR HORST;MüLLER UWE |
分类号 |
G01J1/44;G01J5/00;G01J5/10;H01L21/26;(IPC1-7):A21B1/00 |
主分类号 |
G01J1/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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