| 摘要 |
PROBLEM TO BE SOLVED: To obtain a phenol resin for resist that has good pattern shape, high resolution, layer-remaining properties and excellent heat resistance by using a phenol resin prepared by allowing a specific compound to condense with a polymerizable phenol or with its polymer. SOLUTION: The objective phenol resin is prepared by allowing (A) a compound of formula I (R1-R4 are each H, alkyl or the like), for example, 4- hydroxymethyl-2-methylphenol or the like, to react with (B) a polymerizable phenol of formula II (R5 is H or methyl; R6-R9 are H, an alkyl or the like) for example, 4-vinyl-2-methylphenol or the like or with (C) the polymer prepared by polymerization of the polymerizable phenol. The amount of the component A is 1-50 moles per 100 moles of the constitution units of the polymerizable phenol included in the component B or in the component C, and at least the two components of the component A and the component B or the component C are allowed to react with each other in the presence of an acid to give a phenol resin with a weight-average molecular weight of 2,000-20,000. |
