| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for uniform pressurization with plural cylinders in which a camber is not generated, respective cylinders are made smaller, a whole device is made smaller, e.g. thermo compression bonding or a resin film is uniformly obtained and an electrical capacity of a heater is saved. SOLUTION: Rod 13 lower end parts 13a, 13b of plural down-facing cylinders 1a, 1b switchable in two stages of low/high pressure are connected in free play to respective ends corresponding to an oscillation bar 10 in which the intermediate part is supported to a support body 11 erected at an upper face center part of a sliding plate 5 for pressurizing and is free to tilt/oscillate in the up/ down direction, when a contact pressing plate 17 is brought into contact with an object to be pressurized, at a state respective cylinder 1 insides have a low pressure, respective cylinder rod 13 lower ends are softly brought into contact with a slide plate 5 upper face, after respective cylinder 1 insides are equalized under a low pressure, the pressure is switched to a high pressure, the object to be pressurized is instantly pressurized to a high pressure. |
