发明名称 |
Endpoint detection with light beams of different wavelengths |
摘要 |
A chemical mechanical polishing apparatus includes two optical systems which are used serially to determine polishing endpoints. The first optical system includes a first light source to generate a first light beam which impinges on a surface of the substrate, and a first sensor to measure light reflected from the surface of the substrate to generate a measured first interference signal. The second optical system includes a second light source to generate a second light beam which impinges on a surface of the substrate and a second sensor to measure light reflected from the surface of the substrate to generate a measured second interference signal. The second light beam has a wavelength different from the first light beam.
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申请公布号 |
US6190234(B1) |
申请公布日期 |
2001.02.20 |
申请号 |
US19990300183 |
申请日期 |
1999.04.27 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SWEDEK BOGUSLAW;WISWESSER ANDREAS NORBERT |
分类号 |
H01L21/66;B24B37/04;B24B49/04;B24B49/12;H01L21/304;H01L21/306;H01L31/12;(IPC1-7):B24B7/22 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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