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发明名称
摘要
申请公布号
JP3136596(B2)
申请公布日期
2001.02.19
申请号
JP19900127281
申请日期
1990.05.16
申请人
发明人
分类号
H01L21/339;H01L27/148;H01L29/762;H04N5/335;H04N5/341;H04N5/365;H04N5/369;H04N5/372;(IPC1-7):H01L29/762
主分类号
H01L21/339
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代理人
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