| 摘要 |
PROBLEM TO BE SOLVED: To provide a control system for stage travel device which can smoothly control the speed of a stage travel device and secures the precision of automatic stop control. SOLUTION: A process controller 1 finds the speed signal of the stage travel device 3 by a converting means 19 from a position feedback signal 6 and outputs a corrected speed reference signal 18 generated by correcting a master speed reference signal 17 with this speed signal to a slave motor driving controller 13. The slave motor driving controller 13 performs deceleration speed control over a slave motor 15 by using the corrected speed reference signal 18. Consequently, the stage travel device as an integrated mechanism of multiple motors can be brought under smooth speed control and the precision of automatic stop control can be secured.
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