摘要 |
PROBLEM TO BE SOLVED: To obtain a resonator hardly causing malfunction due to breakdown or deformation, having a long life and a simple structure, and capable of being inexpensive and easily produced and dealing with a high frequency of GHz or higher by providing an oscillation wall, which projects from the surface of a substrate, on the substrate and forming an electrode an its side face. SOLUTION: A substrate 11 and an oscillation wall 12 projecting from the surface of the substrate 11 are provided, and a pair of electrodes 14 are provided on the side face of the oscillation wall 12. When a high frequency electric field is applied on the pair of electrodes 14, oscillation is generated in the perpendicular direction of the oscillation wall 12. That is, perpendicular longitudinal oscillation of oscillation in the direction parallel with the surface of the substrate 11 is used, and the oscillation energy is shut in the oscillation wall 12 to suppress the oscillation energy from leaking to the substrate 11. Consequently, a support film used in a conventional structure is not required to avoid a problem of cracks caused by the support film because oscillation is scarcely transmitted to the substrate 11.
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