| 摘要 |
PROBLEM TO BE SOLVED: To permit the setting of slight pressurizing force necessary for sandwiching a liquid crystal substrate. SOLUTION: A coarse adjustment mechanism 2 is fixed to a supporting member 1 and opening/closing pawls 3a and 3b mounted with upper and lower brackets 4 and 5 open and close in a vertical direction. Diaphragms 8a and 8b having a shape of a thin doughnut-like disk are inserted into the central parts of the brackets 4 and 5 and are sandwiched by fastening members 9a and 9b. Actuators are used for driving movable bodies 10a and 10b and stationary sides 12a and 12b of the actuators are fixed to housings 11a and 11b fastened to the brackets 4 and 5. The movable sides 13a and 13b are arranged so as to move in a contact direction. The coarse adjustment mechanism 2 is stopped in the position in extreme proximity to the liquid crystal substrate 20 by means of an absorber 6 and a stopper nut 7 without coming into contact with the liquid crystal substrate 20. A prober 14 and a dolly plate 15 hold the liquid crystal substrate 20 while both are guided by the diaphragms 8a and 8b and are so controlled that the adequate pressurizing force acts on the substrate.
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