| 摘要 |
PROBLEM TO BE SOLVED: To enhance maintenance work efficiency of the entire facility by an arrangement, wherein individual control sections collect the maintenance information item count of respective semiconductor production systems and deliver the count to a main control section where the maintenance timing of the semiconductor production system is set, based on the received maintenance information item count. SOLUTION: Individual control sections 24a, 24b, 24c, 24d, etc., record the number of execution times of a processing program and the record count concerning the cassette of the processing program for respective semiconductor production systems, collect and store the counts concerning maintenance information items and delivers the counts to a main control section 20. The main control section 20 acquires the counts concerning maintenance information items in real time and stores them in a storage section 23. Based on the received counts concerning maintenance information items, the main control section 20 sets the maintenance timing for a plurality of semiconductor production systems.
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