| 摘要 |
PROBLEM TO BE SOLVED: To obtain the analyzing method capable of easily analyzing the polar surface layer of a solid sample in the depth direction thereof by a simple method without improving a glow discharge tube or device. SOLUTION: In a method for analyzing a solid sample in the depth direction by utilizing glow discharge, a conductive metal member comprising a metal different from the metal to be analyzed of the solid sample becoming a cathode is laminated to at least the measuring surface of the solid sample and, at an initial stage of glow discharge, the measuring surface of the solid sample is protected by the metal membrane and, after glow discharge transfers to a stable state, the solid sample is analyzed from the measuring surface thereof in the depth direction thereof.
|
