| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce as much as possible the fluctuation in output power in a processing laser device irradiating a subject to be processed with a wavelength converted laser beam and processing it. SOLUTION: The laser beam emitted from a laser light source 11 is made incident on a non-linear optical crystal 1 of an LBO, a CLBO, etc., and is wavelength converted to be emitted from the non-linear optical crystal 1. The temp. of the non-linear optical crystal 1 is measured by a sensor 3 to be sent to a controller 5 through a sensor amplifier 4. An optimum phase matching angle that maximum output power is obtained for the temp. of the non-linear optical crystal is stored beforehand in the controller 5, and the controller 5 drives a drive device 6 according to the temp. of the measured non-linear optical crystal 1, and adjusts the angle of the crystal axis of the non-linear optical crystal 1 by an angle moving mechanism 7 to control it so as to become the optimum phase matching angle.</p> |
