| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical device equipped with a fine adjusting mechanism having compact constitution and capable of accurately moving a measuring position. SOLUTION: This device is provided with an observation part having an image incident surface 3 on which the image of the observation area of a surface to be inspected 11 is made incident, image-formation optical systems 1 and 2 enlarging and forming the image of the surface 11 on the surface 3, and an adjusting part 102 for moving an observation area on the surface 11. The adjusting part 102 is provided with a plate member 21 arranged between the optical systems 1 and 2 and the surface 3, and a driving mechanism inclining the member 21 to the optical axis 101 of the optical systems 1 and 2.
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