SEMICONDUCTOR CONTAINER OPEN/CLOSE DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent foreign matters from entering a container by setting a speed difference pressure ratio obtained by dividing the maximum speed when the semiconductor container is opened by the differential pressure between the pressure inside a semiconductor-manufacturing device and that of the outer field to a specific value or less. SOLUTION: A semiconductor container 200 is composed of a container body 210 and a lid 220, and four latch grooves 211 are provided at the container body 210 and a flange 212 is provided around the container body 210. Then, a latch 222 is accommodated in the lid 220 with a cam mechanism, and an opener open/close mechanism is operated horizontally toward the side of the manufacturing device for allowing the lid 220 of the container 200 to depart from the container body 210. In this case, the ratio of the maximum speed (m/s) of the opener open/close mechanism when the container 200 is opened to a differential pressure (Pa) between pressure in the device and that in the outer field is set to 0.006 (m/s.Pa) or less.