| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the deflection of a pair of major sides of a frame toward the inside of the frame and to ensure an effective exposure region by specifying the area of the frame in which a large-sized pellicle film is stretched and protruding the major sides of the frame to which the large-sized pellicle film is stuck toward the outside of the frame. SOLUTION: The frame 1 has major sides 1a and minor sides 1b having mutually different prescribed lengths and sizes. One face of each of the major sides 1a and one face of each of the minor sides 1b are flat all over the frame 1 and form sticking faces 1a1, 1b1 for sticking a pellicle film 2. The area of the frame 1 in which the pellicle film 2 is stretched is >=1,000 cm2 and the major sides 1a of the frame 1 are protruded toward the outside of the frame 1. The deflection of the major sides 1a toward the inside of the frame 1 is suppressed and the effective exposure region of a photomask, a reticle or the like to which the resulting large-sized pellicle is attached can be ensured.</p> |
