| 摘要 |
PROBLEM TO BE SOLVED: To detect an irregular defect on the surface of a transparent material stably and surely, and to determine whether the material is a good article or not. SOLUTION: In this device for inspecting the surface state of a transparent material, a parallel luminous flux 3a having a roughly uniform intensity and a prescribed area is irradiated onto the surface of a test object 4 from the tilted direction at a prescribed angle, and a transmitted light figure and a reflected light figure of the test object 4 produced by the irradiated parallel luminous flux 3a are projected respectively to prescribed imaging elements 7A, 7B by respective independent optical systems, and the surface state of the test object 4 is inspected based on photoelectric conversion signals of the transmitted light figure and the reflected light figure obtained by executing photoelectric conversion. By imaging light intensity distributions of the transmitted light figure and the reflected light figure, an irregular defect on the surface of the transparent material can be detected stably and surely, to enable to determine whether the material is a good article or not.
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