| 摘要 |
PROBLEM TO BE SOLVED: To obtain a device capable of easily forming an electrode, reducing electrode cost, improving insertion loss and extending frequency adjustment range, and superior in electrode adhesive strength to a piezoelectric substrate, by constituting a part of an interdigital electrode (IDT electrode) of α-tantalum. SOLUTION: In this surface acoustic wave device 1, an IDT electrode 3 is formed on a piezoelectric substrate 2. The IDT electrode 3 has a pair of comb-shaped electrodes 3a and 3b having electrode fingers inserted to each other. Electrode fingers of the IDT electrode 3 are extended in the direction orthogonal to the surface wave propagation direction. Reflectors 4 and 5 are formed on both sides on the surface wave propagation direction of the IDT electrode 3. Reflectors 4 and 5 are grating reflectors and have a structure where plural electrode fingers are short-circuited in both ends. In this surface acoustic wave device 1, α-tantalum is used to constitute the IDT electrode 3 and reflectors 4 and 5. |
