摘要 |
PROBLEM TO BE SOLVED: To widely apply to inspection of a solder connection of mounted parts, inspecting a disconnection of printed boards, etc., and highly accurately detect unjointed parts and disconnections. SOLUTION: The electro-optic probe has a light source 2, optical systems 3-5 for condensing light from the light source 2, an electro-optic crystal 6 arranged on the optical path of the optical systems 3-5 which has a transparent electrode 14 and a reflecting film 15 formed to sides of an incidence plane and an emission plane respectively, and changes the birefringence index by an electric field, and a detect means 10 for detecting a polarization change of a linearly polarized light from the light source 2 while the light entering the electro-optic crystal 6 is reciprocated in the electro-optic crystal 6 by the reflecting film 15. In this case, the electro-optic crystal 6 is provided with electric field-shutting means 12 and 13 for blocking the invasion of an external electric field into the electro-optic crystal 6.
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