| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring method and a device capable of measuring a minute three-dimensional shape highly precisely and properly. SOLUTION: The shape of a measuring part of a measuring object 6 having a three-dimensional shape is measured by this method. Surfaces of peripheral regions including the measuring part of the measuring object 6 are exposed successively, and the exposed surfaces of respective peripheral regions are imaged by an imaging means 3. Contour shapes of the measuring part are extracted from image data obtained from the imaged images of the respective peripheral regions, and each contour shape are combined three-dimensionally, to obtain measurement data relative to the measuring part. When the surfaces of the peripheral regions of the measuring part are exposed, surface finishing of the peripheral regions of the measuring part is executed by a laser beam.
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