发明名称 AUTOMATION SYSTEM AND METHOD OF SEMICONDUCTOR FACTORY
摘要 PROBLEM TO BE SOLVED: To easily identify errors of a server by storing processor state information in real time, retrieving state information and displaying retrieved state information. SOLUTION: A real-time data base 300 stores the state information of servers, e.g. CMS 206, DGS 107, OIS 201 and EQS 202, and a monitoring server 902 retrieves the state information of the server in real time. A screen 901, coupled with the monitoring server 902, displays the states of servers, e.g. ICS 210, SCS 218, CMS 206, OIS 201 and DGS 207. One display space displays the state of each relevant server, and the other display space displays the utilization rate of a disc associated with that server.
申请公布号 JP2001044091(A) 申请公布日期 2001.02.16
申请号 JP20000188364 申请日期 2000.06.22
申请人 HYUNDAI ELECTRONICS IND CO LTD 发明人 KIM YOUNG-JIN
分类号 H01L21/02;G05B19/042;G06F11/30;(IPC1-7):H01L21/02 主分类号 H01L21/02
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