| 摘要 |
PROBLEM TO BE SOLVED: To enable measurement of a sectional size efficiently and accurately by image processing an X-ray image obtained through irradiation of a sectional part to be measured with X rays, and measuring the size based on a reference size. SOLUTION: A drum 10 is set on a sample table 14 of a drum retaining part 3, then X rays are applied in a tangential direction of the drum 10 from an X-ray emission part 1 with a minute focus to thereby obtain an X-ray image of a caulking part 15 so that the part 15 being a sectional part of the drum 10 to be measured may be irradiated with the X rays. A image processor 18 measures reference coordinates and/or reference length through inputting an X-ray image of a mask pattern for obtaining a highly accurate size as well as the X-ray image of the part 15, and based on the coordinates and/or the length each sectional size of the part 15 is computed. Then, the measurement result is displayed on a TV monitor 19.
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