| 摘要 |
PROBLEM TO BE SOLVED: To give the same characteristics to a prescribed transistor, which is formed on a chip main body region, and a transistor for an IPC-TEG, which is formed on a scribed line region in a state corresponding to this transistor. SOLUTION: An active region 22b for forming an IPC-TEG is arranged on a scribed line region 12, in such a way that the periphery of the region 22 is encircled with a plurality of narrow dummy trenches 20b, a plurality of narrow dummy trenches 20c are formed on the remaining scribed line region 12, and a multitude of rectangular dummy active regions 22c are insularly provided on the excess scribed line region 12. For this, an active area ratio in this region 12 is set almost equal to that in a circuit forming region 16 of a chip main body region 10.
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