发明名称 THIN FILM MAGNETIC HEAD AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To avoid such trouble that a resist insulating film on a recording coil is removed by etching by selectively providing a protective layer on an interlayer insulating film of a conductive material coil except a region of an upper magnetic pole formed on the interlayer insulating film. SOLUTION: A protective layer 17 is coated on a conductive material coil 12 on a recording head so as to avoid the region of an upper magnetic pole 16. The protective layer 17 consists preferably of an insulating material resulting from an organic resist material or an inorganic insulating material. The protective layer 17 consisting of such a material is film-formed by a sputtering method or the like, and then can be patterned by etching or the like. Since such protective layer 17 is formed on an interlayer insulating film on the recording coil 12 so as to enclose the upper magnetic pole 16, at the time of trimming of the upper magnetic pole 16, the interlayer insulating film on the recording coil 12 can be protected and the occurrence of a problem such as exposure of the recording coil 12 can be prevented.
申请公布号 JP2001043511(A) 申请公布日期 2001.02.16
申请号 JP19990212207 申请日期 1999.07.27
申请人 FUJITSU LTD 发明人 OTSUKA YOSHINORI
分类号 G11B5/31;G11B5/39;(IPC1-7):G11B5/31 主分类号 G11B5/31
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